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Alternative lithographic technologies III (1-3 March 2011, San Jose, California, United States)Herr, Daniel J. C.Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 7970, issn 0277-786X, isbn 978-0-8194-8529-8, 1 vol, isbn 978-0-8194-8529-8Conference Proceedings
